HELIOS REACTOR GATE VALVE
This is the HELIOS Gate Valve designed for superior functionality in the OEM Epsilon reactor, including 2000 and 2500 models. This unique and novel engineered design solves the ongoing problems of the OEM design(s), like proper and consistent sealing, practically eliminating OEM gate valve particle generation.
Maintenance activities are simplified and downtime is reduced to a fraction of the time required by OEM offerings.
Helios Gate Valves are installed globally with outstanding performance results.
ASM® and EPSILON® are registered trademarks of ASM International. Neither Helios Technical Services nor its products are affiliated with, licensed, approved by or sponsored by ASM International.
- This view shows the valve in the closed and sealed position.
- All pivots utilize precision needle bearings, krytox lubrication and are sealed.
- The Helios design allows for proper and repeatable sealing of the o-ring for leak free operation.
- This view shows the valve in its open position, completely below the Reactor Flange opening allowing more clearance for wafer and wand to enter and exit the reactor.
- Machined components are accurately manufactured and treated. The actual Gate is stainless steel 316L and can be replaced independently.
- O-Ring maintenance and replacement takes less than an hour including leak check – no realignment is necessary after O-Ring change.