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-Helios-
Helios Technical Services combines quality products and services with strategic marketing at competitive pricing to improve equipment performance and deliver the best solutions for the semiconductor industry equipment segment.
Ask us about our unique solutions-based approach to improve your manufacturing costs and advance your equipment performance
our specialty Products
ASM E2000 reactor gate valve
This is the new HELIOS reactor Gate Valve for the E2000. This entirely new design solves the ongoing standard valve problems, like poor sealing and particles. This valve uses the existing 2-260 O-ring, however O-ring change out takes only a fraction of the time.
We have these valves running production in several fabs, with outstanding performance results.
HELIOS Gate Valve in the closed position
This view shows the valve closed and in the sealed position to the injector flange.
All pivots are case hardened and krytox lubricated and 100% sealed.
The new actuation cylinder provides more closing force to properly compress the sealing O-ring to Parker 20% O-ring squeeze for leak free operation.
HELIOS gate valve in the open position
This view shows the valve in the open position. There is 13mm of clearance to the wand and transfer arms while open.
Machined components are high quality anodized aluminum. The Gate itself is 316 L Stainless Steel.
Installation of this unit is less than one hour.
Maintenance of the reactor seal O-ring takes less than 15 minutes.
Injector exploded view
This is a view of the Injector disassembled.
We have these Injectors running production in several fabs, with outstanding performance results.
Helios offers a cost effective rebuild program for these injectors. Email Steve Burch and get the details.
HELIOS Injectors
This new Injector from Helios is an improvement on the ASM OEM and any aftermarket injector, for 200mm and 300mm tools.
We pulled out all of the stops on this new improved design. The manufacturing method and inspection methods are far better than any previous injector out in the market.
We built our own “in house” inspection and calibration equipment to get you the best performing injector you can buy.
Some key features include:
- A real ZERO setting, that shuts off flow!
- Energized Needle Seal
- Easy adjustable micrometer vernier for better viewing
- On-the-fly re-Zeroing
HELIOS Injector flow curve
This is a typical calibration flow curve of one of our injectors.
The left Axis relates to the rising flow with respect to the micrometer settings. It’s hard to see, but these 5 injectors fall over top of each other, so The right Axis is related to the bumpy flat curves that depict “of reading %” of setpoint match for these 5 units.
The NEW HELIOS TC Sentry System ™
If you have Thermocouple sheath failures at your Fab and never know when a batch of wafers are at risk, we have the product for you.
The TC Sentry System will detect a TC wall breach in less than two minutes when connected to LeakDefender™ brand TCs from Conax.
https://www.conaxtechnologies.com/leakdefender/
The system is capable of warning the Fab, or shutting down the tool. This is all user programable.
This product will pay for itself in just one failed TC detection for 300mm tools. Contact Steve Burch for full cost evaluation of your TC breached wafer scrap.
the sentry system can mount anywhere you choose
This product can be hidden in the Water cabinet for a clean installation.
mounts for quick viewing
The unit can be mounted for quick viewing, even thru the door window.
The control box mounts by a strong magnet. No drilling needed.
our Services
EPI Process Support & Development
Our years of experience in process recipe development and improvement programs can be executed on your site and provide improved process control, rapid return to production, and “First Time Right” methodology for elimination of recurring equipment down situations for a single issue.
Our programs are designed to meet your performance, cost, productivity and tunability. We specialize in ‘after PM’ tool-up-to-production techniques.
Epitaxial Tool Performance Improvement
Our expertise in tool performance and matching techniques will improve your overall Epi performance and cost while significantly improving equipment dependent uptime. Improvements include: reduced / enhanced PM downtime, reduced troubleshooting time, improved throughput, and improved yield. Additionally, understanding your peripheral equipment, requirements and constraints will lead to additional factory performance improvements.
Special tool engineering services
We can provide an engineering solution to most of your tool and fab problems.
Do you have any ongoing problems that need a fresh set of eyes? We excel at tough challenges and are here to help.
Contact us today for a discussion on how we can help solve those nagging engineering issues that have been impacting your bottom line.
our Standard Products
Helios E2000 scorpion Transfer Arms
The Scorpion Arm is a Brand new design of transfer arms to obsolete the old OEM arms.
- Performance test certification provided with each individual arm.
- Helios has developed a brand new Arm assembly that provides superior particle improvements.
- Helios uses a Very High Precision alignment fixture that virtually eliminates sag.
- Limited warranty
Ask about our equipment uptime performance improvement annual program
Helios E2000 Scorpion Transfer Arms (Bottom View)
Brand new design of transfer arms to obsolete the old OEM arms.
- No more external Gears to spall off particulates
- Helios has improved all of the internal components for better N2 sealing.
- All arms are cycle purged with our “in house” designed Impact Purge System.
- Each Arm set is particle checked on our “in-house” particle measurement tool
- Limited warranty
Why did Helios design a new Arm? Because we found the OEM arms to be not practical for rebuilding. The Helios Arm is mostly an all new design. This arm has very little sag, is very clean on the outside and inside, and is 100% verifiable for gas path cleanliness on rebuilds.
The Last Arm you will ever need to buy.
Merlin E2500 wafer handler robot system
The MERLIN Wafer Handling System replaces the Cybeq system in the 2500 tool.
Helios supplies an interface box for an easy plug and play installation.
Also an E2000 Merlin available!
Merlin E2500 wafer handler robot system
We provide a new Helios WTA-Int Board for all communication to the controller.
The Merlin System comes with automatic wafer detection that allows 2 speed operation, up to 300% faster, when no wafer is on the Wand. Fantastic for those thin layer recipes.
Merlin E2500 wafer handler robot system
The Merlin System comes with a Maintenance Pendant for easy wafer changes and other maintenance operations
Ask about our equipment uptime performance improvement program
Helios Temperature Control Boards
The new Helios Temperature Control Boards are a direct replacement for the Foxborough boards
Helios Temperature Control Boards
We provide a single zone board that is zone selectable, or you can have all four zones on one big board that fits nicely into one Foxborough slot.
These controllers offer the same communication speeds as the OEM board, however offer much faster computation speeds for even quicker temperature settling times.
ASM E2000 Extension Motor Lower Mounting Plate
This Motor Mount Plate is redesigned for the new motors and will grip the tapered motor housing for an excellent fit. It also has a “Stop” built into it for a much more accurate assembly location. This Plate has solved problems with “shaky Arms” at Home position.
ASM Temperature Transmitters
We provide a cost-effective OEM Temperature Transmitter replacement. These Transmitters are fully programmed and ready to instal for your “Type R” TC’s
ASM E2000 Reactor Tube Present Sensor
OEM Tube Present Sensor
ASM E2000 WHC Gear Box
The Helios Gear Box is a re-designed unit on the inside. Our Aircraft quality gears are hobbed from 316L Stainless one- piece billet units for 100% concentricity and smooth running. We sputter our proprietary coating on the Gear Teeth for extra-long life. Our mounting method uses your same lower housing but eliminates the difficult to get to short mounting screws.
ASM E2000 Susceptor Lift Cylinder
This Cylinder fits both LH and RH Tools. Just remove the sensor rail you don’t need.
Helios Bubblers
Helios has manufactured mini bubblers for dopant sources. Give us your design requirements and we can build you a super clean bubbler for your liquid source.
our expertise
Steve Burch- President
Steve leads the global technical sales and marketing efforts with almost thirty years direct experience with multiple tool sets around the world and in-depth understanding of fab equipment performance issues and the requirements and challenges facing those responsible. This includes managing cost of ownership concerns. Steve’s unique ability to translate customer requirements into offerings originate with his listening skills and financial acumen. These skills enable customers to be at ease even for their most-challenging tool concerns.
Mike has over thirty five years engineering experience that includes EPI reactors, ALD tools, and wafer handling systems. Mike has over 100 US and international patents in metrology, vehicle suspension systems, 3D additive manufacturing, and semiconductor equipment tools. Problem solving with unique, cost-effective engineering solutions is one of Mike’s best attributes.