The Helios Merlin™ Wafer Handling System completely replaces the outdated and poor performing OEM handling system in both the 2000 and 2500 models.

• The Merlin Wafer Handling System replaces all hardware, compumotors and Parker motor drivers and is easy to set up.
• The Merlin™ Wafer Handling System communicates with the GESPAC controller seamlessly and utilizes the existing screen controls.
• The Merlin™ System has a unique, two speed operation, that allows up to 300% faster movements. Fantastic for those thin layer recipes.
• The Merlin System comes with an added maintenance pendent for easy, accurate maintenance activities.

ASM® and E2000/E2500 are registered trademarks of ASM International. Neither Helios Technical Services nor its products are affiliated with, licensed, approved by or sponsored by ASM International.