HELIOS TC SENTRY™ SYSTEM with CONAX LeakDefender™ Thermocouples
We have partnered with Conax Technologies to provide specific and superior thermocouples for epitaxy reactors when coupled with the Helios TC Sentry™ System.
The Conax LeakDefender™ thermocouples are specifically designed to work with the TC SENTRY™ SYSTEM and are as easy to install and maintain as your existing Conax thermocouples.
Benefits of this system:
- Improve yield
- Increase tool and cleanroom safety
- Lower tool cost of ownership
- Reduction of both scheduled and unscheduled downtime
- Cost effective monitoring